BibTeX record journals/mr/GoldbergYLRKMBU11

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@article{DBLP:journals/mr/GoldbergYLRKMBU11,
  author    = {Bennett B. Goldberg and
               A. Yurt and
               Yang Lu and
               E. Ramsay and
               F. H. K{\"{o}}kl{\"{u}} and
               J. Mertz and
               T. G. Bifano and
               M. S. {\"{U}}nl{\"{u}}},
  title     = {Chromatic and spherical aberration correction for silicon aplanatic
               solid immersion lens for fault isolation and photon emission microscopy
               of integrated circuits},
  journal   = {Microelectron. Reliab.},
  volume    = {51},
  number    = {9-11},
  pages     = {1637--1639},
  year      = {2011}
}
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