"Multi-scale analysis of polysilicon MEMS sensors subject to accidental ..."

Aldo Ghisi et al. (2009)

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DOI: 10.1016/J.MICROREL.2008.12.010

access: closed

type: Journal Article

metadata version: 2020-02-22

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Aldo Ghisi, Fabio Fachin, Stefano Mariani, Sarah Zerbini:
Multi-scale analysis of polysilicon MEMS sensors subject to accidental drops: Effect of packaging. Microelectron. Reliab. 49(3): 340-349 (2009)

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