"Subsurface analysis of semiconductor structures with helium ion microscopy."

Raoul van Gastel et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.06.130

access: closed

type: Journal Article

metadata version: 2020-02-22

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Raoul van Gastel, Gregor Hlawacek, Harold J. W. Zandvliet, Bene Poelsema:
Subsurface analysis of semiconductor structures with helium ion microscopy. Microelectron. Reliab. 52(9-10): 2104-2109 (2012)

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