"Effects of impurity concentration, hydrogen plasma process and ..."

Rodolfo Zolá García-Lozano, Magali Estrada, Antonio Cerdeira (2003)

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DOI: 10.1016/S0026-2714(03)00128-8

access: closed

type: Journal Article

metadata version: 2020-02-22

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Rodolfo Zolá García-Lozano, Magali Estrada, Antonio Cerdeira:
Effects of impurity concentration, hydrogen plasma process and crystallization temperature on poly-crystalline films obtained from PECVD a-Si: H layers. Microelectron. Reliab. 43(8): 1281-1287 (2003)

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