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"Impact and damage on deep sub-micron CMOS technology induced by substrate ..."

Philippe Galy et al. (2009)

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DOI: 10.1016/J.MICROREL.2009.07.039

access: closed

type: Journal Article

metadata version: 2023-11-08

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Philippe Galy, Sylvain Dudit, Michel Vallet, Corinne Richier, Christophe Entringer, Frank Jezequel, E. Petit, J. Beltritti:
Impact and damage on deep sub-micron CMOS technology induced by substrate current due to ESD stress. Microelectron. Reliab. 49(9-11): 1107-1110 (2009)

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