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"Stress in three-dimensionally integrated sensor systems."

Lado Filipovic, Siegfried Selberherr (2016)

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DOI: 10.1016/J.MICROREL.2015.09.013

access: closed

type: Journal Article

metadata version: 2020-02-22

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Lado Filipovic, Siegfried Selberherr:
Stress in three-dimensionally integrated sensor systems. Microelectron. Reliab. 61: 3-10 (2016)

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