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"The effects of etching and deposition on the performance and stress ..."

Lado Filipovic, Siegfried Selberherr (2014)

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DOI: 10.1016/J.MICROREL.2014.07.014

access: closed

type: Journal Article

metadata version: 2020-02-22

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Lado Filipovic, Siegfried Selberherr:
The effects of etching and deposition on the performance and stress evolution of open through silicon vias. Microelectron. Reliab. 54(9-10): 1953-1958 (2014)

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