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"Nanoscale thermally induced stress analysis by complementary Scanning ..."

M. Fakhri et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.134

access: closed

type: Journal Article

metadata version: 2024-02-05

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M. Fakhri, A.-K. Geinzer, Ralf Heiderhoff, L. J. Balk:
Nanoscale thermally induced stress analysis by complementary Scanning Thermal Microscopy techniques. Microelectron. Reliab. 50(9-11): 1459-1463 (2010)

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