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"Electrical failure analysis of peristaltic micropumps fabricated with PZT ..."

Bing-Liang Chen et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.01.004

access: closed

type: Journal Article

metadata version: 2020-02-22

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Bing-Liang Chen, Pao-Cheng Huang, Ling-Sheng Jang, Ming-Kun Chen:
Electrical failure analysis of peristaltic micropumps fabricated with PZT actuators. Microelectron. Reliab. 52(6): 1080-1085 (2012)

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