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"MEMS packaging reliability assessment: Residual Gas Analysis of gaseous ..."

Pierre-Louis Charvet et al. (2013)

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DOI: 10.1016/J.MICROREL.2013.07.021

access: closed

type: Journal Article

metadata version: 2020-03-17

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Pierre-Louis Charvet, P. Nicolas, D. Bloch, B. Savornin:
MEMS packaging reliability assessment: Residual Gas Analysis of gaseous species trapped inside MEMS cavities. Microelectron. Reliab. 53(9-11): 1622-1627 (2013)

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