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"Improving an LDMOST by variation of lateral doping on epitaxial-layer ..."

Yang-Hua Chang, Chia-Hao Chang (2011)

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DOI: 10.1016/J.MICROREL.2011.06.012

access: closed

type: Journal Article

metadata version: 2020-02-22

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Yang-Hua Chang, Chia-Hao Chang:
Improving an LDMOST by variation of lateral doping on epitaxial-layer drift region. Microelectron. Reliab. 51(12): 2059-2063 (2011)

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