"Remote carrier trapping in FinFETs with ONO buried layer: Temperature effects."

Sung-Jae Chang et al. (2013)

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DOI: 10.1016/J.MICROREL.2012.10.002

access: closed

type: Journal Article

metadata version: 2020-02-22

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Sung-Jae Chang, Maryline Bawedin, Wade Xiong, Jong-Hyun Lee, Jung-Hee Lee, Sorin Cristoloveanu:
Remote carrier trapping in FinFETs with ONO buried layer: Temperature effects. Microelectron. Reliab. 53(3): 386-393 (2013)

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