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"Out of plane vs in plane flexural behaviour of thin polysilicon films: ..."

Fabrizio Cacchione et al. (2005)

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DOI: 10.1016/J.MICROREL.2005.07.090

access: closed

type: Journal Article

metadata version: 2021-02-02

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Fabrizio Cacchione, Alberto Corigliano, Biagio De Masi, Caterina Riva:
Out of plane vs in plane flexural behaviour of thin polysilicon films: Mechanical characterization and application of the Weibull approach. Microelectron. Reliab. 45(9-11): 1758-1763 (2005)

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