BibTeX record journals/mr/BuzzoLSCSF04

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@article{DBLP:journals/mr/BuzzoLSCSF04,
  author    = {Marco Buzzo and
               Markus Leicht and
               Thomas Schweinb{\"{o}}ck and
               Mauro Ciappa and
               Maria Stangoni and
               Wolfgang Fichtner},
  title     = {2D Dopant Profiling on 4H Silicon Carbide P\({}^{\mbox{+}}\)N Junction
               by Scanning Capacitance and Scanning Electron Microscopy},
  journal   = {Microelectron. Reliab.},
  volume    = {44},
  number    = {9-11},
  pages     = {1681--1686},
  year      = {2004},
  url       = {https://doi.org/10.1016/j.microrel.2004.07.053},
  doi       = {10.1016/j.microrel.2004.07.053},
  timestamp = {Sat, 22 Feb 2020 19:28:06 +0100},
  biburl    = {https://dblp.org/rec/journals/mr/BuzzoLSCSF04.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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