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"Intermittent contact scanning capacitance microscopy-An improved method ..."

Peter Breitschopf et al. (2005)

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DOI: 10.1016/J.MICROREL.2005.07.047

access: closed

type: Journal Article

metadata version: 2022-12-07

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Peter Breitschopf, Guenther Benstetter, Bernhard Knoll, Werner Frammelsberger:
Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling. Microelectron. Reliab. 45(9-11): 1568-1571 (2005)

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