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"A low power MEMS gas sensor based on nanocrystalline ZnO thin films for ..."

Partha Bhattacharyya et al. (2008)

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DOI: 10.1016/J.MICROREL.2008.07.063

access: closed

type: Journal Article

metadata version: 2024-04-20

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  - https://dblp.org/rec/journals/mr/BhattacharyyaBMS08
Partha Bhattacharyya, Palash Kumar Basu, Biplob Mondal, H. Saha:
A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane. Microelectron. Reliab. 48(11-12): 1772-1779 (2008)

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