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"Kelvin probe microscopy for reliability investigation of RF-MEMS ..."
A. Belarni et al. (2008)
- A. Belarni, Mohamed Lamhamdi, Patrick Pons
, Laurent Boudou
, Jean Guastavino, Y. Segui, George J. Papaioannou
, Robert Plana:
Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches. Microelectron. Reliab. 48(8-9): 1232-1236 (2008)
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