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"Influence of air gaps on the thermal-electrical-mechanical behavior of a ..."
Irina Bauer, Kirsten Weide-Zaage, Lutz Meinshausen (2011)
- Irina Bauer, Kirsten Weide-Zaage, Lutz Meinshausen:
Influence of air gaps on the thermal-electrical-mechanical behavior of a copper metallization. Microelectron. Reliab. 51(9-11): 1587-1591 (2011)

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