"Influence of air gaps on the thermal-electrical-mechanical behavior of a ..."

Irina Bauer, Kirsten Weide-Zaage, Lutz Meinshausen (2011)

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DOI: 10.1016/J.MICROREL.2011.07.011

access: closed

type: Journal Article

metadata version: 2020-02-22

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Irina Bauer, Kirsten Weide-Zaage, Lutz Meinshausen:
Influence of air gaps on the thermal-electrical-mechanical behavior of a copper metallization. Microelectron. Reliab. 51(9-11): 1587-1591 (2011)

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