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"Effects of residual stresses on cracking and delamination risks of an ..."

Jürgen Auersperg et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.084

access: closed

type: Journal Article

metadata version: 2022-03-23

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Jürgen Auersperg, Christian Collet, Thierry Dean, Dietmar Vogel, Thomas Winkler:
Effects of residual stresses on cracking and delamination risks of an avionics MEMS pressure sensor. Microelectron. Reliab. 64: 665-668 (2016)

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