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"Application of Scanning Microwave Microscopy nano-C-V to investigate ..."

Oskar Amster et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.06.106

access: closed

type: Journal Article

metadata version: 2021-06-04

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Oskar Amster, K. A. Rubin, Y. Yang, D. Iyer, Arron Messinger:
Application of Scanning Microwave Microscopy nano-C-V to investigate dopant defect under a poly gate device. Microelectron. Reliab. 88-90: 250-254 (2018)

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