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"Charging induced damage by photoconduction through thick inter metal ..."

Jan Ackaert, Klara Bessemans, Eddy De Backer (2003)

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DOI: 10.1016/S0026-2714(03)00270-1

access: closed

type: Journal Article

metadata version: 2020-02-22

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Jan Ackaert, Klara Bessemans, Eddy De Backer:
Charging induced damage by photoconduction through thick inter metal dielectrics. Microelectron. Reliab. 43(9-11): 1525-1529 (2003)

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