"Low-temperature deposition of silicon oxide and silicon nitride by ..."

Luís da Silva Zambom, Ronaldo Domingues Mansano, Ana Paula Mousinho (2009)

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DOI: 10.1016/J.MEJO.2008.07.017

access: closed

type: Journal Article

metadata version: 2024-10-06

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Luís da Silva Zambom, Ronaldo Domingues Mansano, Ana Paula Mousinho:
Low-temperature deposition of silicon oxide and silicon nitride by reactive magnetron sputtering. Microelectron. J. 40(1): 66-69 (2009)

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