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"Fabrication and characterization of stacked ZnO and ..."
Y. Zaatar et al. (2007)
- Y. Zaatar, R. Al Asmar, J. Podlecki, S. Youssef, M. Abdallah, N. Ouaini, A. Foucaran:
Fabrication and characterization of stacked ZnO and ZnOGa2O3 layers for the realization of bulk acoustic wave resonated membranes. Microelectron. J. 38(4-5): 538-546 (2007)
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