"Design, fabrication, and preliminary characterization of a novel MEMS ..."

Chenyang Xue et al. (2007)

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DOI: 10.1016/J.MEJO.2007.09.008

access: closed

type: Journal Article

metadata version: 2023-06-26

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Chenyang Xue, Shang Chen, Wendong Zhang, Binzhen Zhang, Guojun Zhang, Hui Qiao:
Design, fabrication, and preliminary characterization of a novel MEMS bionic vector hydrophone. Microelectron. J. 38(10-11): 1021-1026 (2007)

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