"An acoustic pressure-gradient MEMS vector hydrophone system based on ..."

Xiangyang Wang, Chongbin Liu, Guoqiang Wu (2024)

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DOI: 10.1016/J.MEJO.2024.106332

access: closed

type: Journal Article

metadata version: 2024-08-22

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Xiangyang Wang, Chongbin Liu, Guoqiang Wu:
An acoustic pressure-gradient MEMS vector hydrophone system based on piezoelectric micromachined ultrasonic transducer array. Microelectron. J. 151: 106332 (2024)

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