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"The properties of aluminum, platinum silicide and copper based contacts ..."

J. Vobecký, D. Kolesnikov (2006)

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DOI: 10.1016/J.MEJO.2005.09.013

access: closed

type: Journal Article

metadata version: 2020-02-22

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J. Vobecký, D. Kolesnikov:
The properties of aluminum, platinum silicide and copper based contacts for silicon high-power devices. Microelectron. J. 37(3): 236-242 (2006)

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