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"Chemical and morphological properties of (Ti-Zr)N thin films grown in an ..."

O. A. Trujillo et al. (2008)

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DOI: 10.1016/J.MEJO.2008.01.067

access: closed

type: Journal Article

metadata version: 2023-10-16

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O. A. Trujillo, Harvi Alirio Castillo, L. C. Agudelo, Alfonso Devia:
Chemical and morphological properties of (Ti-Zr)N thin films grown in an arc pulsed system. Microelectron. J. 39(11): 1379-1381 (2008)

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