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"Mass patterning of polysiloxane layers using spin coating and ..."
Benoît Torbiéro et al. (2006)
- Benoît Torbiéro, Marie-Laure Pourciel-Gouzy, Iryna Humenyuk, Jean-Baptiste Doucet, Augustin Martinez, Pierre Temple-Boyer:
Mass patterning of polysiloxane layers using spin coating and photolithography techniques. Microelectron. J. 37(2): 133-136 (2006)
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