BibTeX record journals/mj/SzaboNR09

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@article{DBLP:journals/mj/SzaboNR09,
  author    = {P{\'{e}}ter G. Szab{\'{o}} and
               Bal{\'{a}}zs N{\'{e}}meth and
               M{\'{a}}rta Rencz},
  title     = {Thermal transient characterisation of the etching quality of micro
               electro mechanical systems},
  journal   = {Microelectron. J.},
  volume    = {40},
  number    = {7},
  pages     = {1042--1047},
  year      = {2009},
  url       = {https://doi.org/10.1016/j.mejo.2007.07.119},
  doi       = {10.1016/j.mejo.2007.07.119},
  timestamp = {Sat, 22 Feb 2020 19:33:51 +0100},
  biburl    = {https://dblp.org/rec/journals/mj/SzaboNR09.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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