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"A novel linearly tunable butterfly-shape MEMS capacitor."
Mohammad Shavezipur, Amir Khajepour, S. M. Hashemi (2008)
- Mohammad Shavezipur, Amir Khajepour, S. M. Hashemi:
A novel linearly tunable butterfly-shape MEMS capacitor. Microelectron. J. 39(5): 756-762 (2008)
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