"Spin-coated PMMA films."

N. G. Semaltianos (2007)

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DOI: 10.1016/J.MEJO.2007.04.019

access: closed

type: Journal Article

metadata version: 2020-02-22

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N. G. Semaltianos:
Spin-coated PMMA films. Microelectron. J. 38(6-7): 754-761 (2007)

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