"Investigation of pillar thickness variation effect on oblique rotating ..."

Munawar Agus Riyadi, Ismail Saad, Razali Ismail (2010)

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DOI: 10.1016/J.MEJO.2010.07.004

access: closed

type: Journal Article

metadata version: 2022-12-28

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Munawar Agus Riyadi, Ismail Saad, Razali Ismail:
Investigation of pillar thickness variation effect on oblique rotating implantation (ORI)-based vertical double gate MOSFET. Microelectron. J. 41(12): 827-833 (2010)

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