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"Applications of LIGA technology to precision manufacturing of ..."

Chantal Khan Malek, Volker Saile (2004)

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DOI: 10.1016/J.MEJO.2003.10.003

access: closed

type: Journal Article

metadata version: 2020-02-22

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Chantal Khan Malek, Volker Saile:
Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review. Microelectron. J. 35(2): 131-143 (2004)

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