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"Defect detection of IC wafer based on two-dimension wavelet transform."

Hongxia Liu et al. (2010)

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DOI: 10.1016/J.MEJO.2010.01.015

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mj/LiuZKCG10
Hongxia Liu, Wen Zhou, Qianwei Kuang, Lei Cao, Bo Gao:
Defect detection of IC wafer based on two-dimension wavelet transform. Microelectron. J. 41(2-3): 171-177 (2010)

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