"The influence of growth temperature and precursors' doses on electrical ..."

Tomasz Krajewski et al. (2009)

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DOI: 10.1016/J.MEJO.2008.07.053

access: closed

type: Journal Article

metadata version: 2021-04-28

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Tomasz Krajewski, E. Guziewicz, Marek Godlewski, Lukasz Wachnicki, I. A. Kowalik, A. Wojcik-Glodowska, M. Lukasiewicz, K. Kopalko, V. Osinniy, M. Guziewicz:
The influence of growth temperature and precursors' doses on electrical parameters of ZnO thin films grown by atomic layer deposition technique. Microelectron. J. 40(2): 293-295 (2009)

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