"A large-scale parametric study of InP deposition on patterned substrates."

Jonathan E. Greenspan (2006)

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DOI: 10.1016/J.MEJO.2006.04.006

access: closed

type: Journal Article

metadata version: 2020-02-22

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Jonathan E. Greenspan:
A large-scale parametric study of InP deposition on patterned substrates. Microelectron. J. 37(10): 1056-1063 (2006)

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