"Crystallographic effects in modeling fundamental behavior of MEMS silicon ..."

Shirin Ghaffari et al. (2013)

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DOI: 10.1016/J.MEJO.2013.03.010

access: closed

type: Journal Article

metadata version: 2022-09-02

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Shirin Ghaffari, Chae H. Ahn, Eldwin Jiaqiang Ng, Shasha Wang, Thomas W. Kenny:
Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators. Microelectron. J. 44(7): 586-591 (2013)

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