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"A novel harmless trimming for micro-device with defects and particles in ..."

Yongqi Fu, Zhongwei Shen, Ngoi Kok Ann Bryan (2004)

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DOI: 10.1016/J.MEJO.2003.10.006

access: closed

type: Journal Article

metadata version: 2020-02-22

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Yongqi Fu, Zhongwei Shen, Ngoi Kok Ann Bryan:
A novel harmless trimming for micro-device with defects and particles in arbitrary geometry by fine milling of focused ion beam. Microelectron. J. 35(2): 111-115 (2004)

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