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"Chemical analysis of CNx thin films produced by pulsed laser ..."

L. M. Franco, J. A. Pérez, H. Riascos (2008)

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DOI: 10.1016/J.MEJO.2008.01.091

access: closed

type: Journal Article

metadata version: 2020-02-22

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L. M. Franco, J. A. Pérez, H. Riascos:
Chemical analysis of CN_x thin films produced by pulsed laser ablation. Microelectron. J. 39(11): 1363-1365 (2008)

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