"NIL - a low-cost and high-throughput MEMS fabrication method compatible ..."

Xiqiu Fan et al. (2006)

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DOI: 10.1016/J.MEJO.2005.04.047

access: closed

type: Journal Article

metadata version: 2020-02-22

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Xiqiu Fan, Honghai Zhang, Sheng Liu, Xiaofeng Hu, Ke Jia:
NIL - a low-cost and high-throughput MEMS fabrication method compatible with IC manufacturing technology. Microelectron. J. 37(2): 121-126 (2006)

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