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"Thermal parameters identification of micrometric layers of microelectronic ..."

Stefan Dilhaire et al. (2004)

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DOI: 10.1016/J.MEJO.2004.06.012

access: closed

type: Journal Article

metadata version: 2021-10-14

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Stefan Dilhaire, Stéphane Grauby, Wilfrid Claeys, Jean-Christophe Batsale:
Thermal parameters identification of micrometric layers of microelectronic devices by thermoreflectance microscopy. Microelectron. J. 35(10): 811-816 (2004)

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