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"Microelectromechanical resonator manufactured using CMOS-MEMS technique."

Ching-Liang Dai, Cheng-Hsiung Kuo, Ming-Chao Chiang (2007)

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DOI: 10.1016/J.MEJO.2007.05.008

access: closed

type: Journal Article

metadata version: 2022-10-02

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Ching-Liang Dai, Cheng-Hsiung Kuo, Ming-Chao Chiang:
Microelectromechanical resonator manufactured using CMOS-MEMS technique. Microelectron. J. 38(6-7): 672-677 (2007)

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