"Modeling and fabrication of a microelectromechanical microwave switch."

Ching-Liang Dai et al. (2007)

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DOI: 10.1016/J.MEJO.2007.03.012

access: closed

type: Journal Article

metadata version: 2022-10-02

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Ching-Liang Dai, Heng-Ming Hsu, Ming-Chang Tsai, Ming-Ming Hsieh, Ming-Wei Chang:
Modeling and fabrication of a microelectromechanical microwave switch. Microelectron. J. 38(4-5): 519-524 (2007)

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