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"Computational study of variations in gap size for the electrostatic ..."

Shiang-Woei Chyuan, Yunn-Shiuan Liao, Jeng-Tzong Chen (2004)

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DOI: 10.1016/J.MEJO.2004.06.005

access: closed

type: Journal Article

metadata version: 2022-10-02

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  - https://dblp.org/rec/journals/mj/ChyuanLC04
Shiang-Woei Chyuan, Yunn-Shiuan Liao, Jeng-Tzong Chen:
Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEM. Microelectron. J. 35(9): 739-748 (2004)

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