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"Computational study of variations in gap size for the electrostatic ..."
Shiang-Woei Chyuan, Yunn-Shiuan Liao, Jeng-Tzong Chen (2004)
- Shiang-Woei Chyuan, Yunn-Shiuan Liao, Jeng-Tzong Chen:
Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEM. Microelectron. J. 35(9): 739-748 (2004)
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