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"Ohmic contacts to single-crystalline 3C-SiC films for extreme-environment ..."

Gwiy-Sang Chung, Kyu-Hyung Yoon (2008)

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DOI: 10.1016/J.MEJO.2008.06.052

access: closed

type: Journal Article

metadata version: 2020-02-22

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Gwiy-Sang Chung, Kyu-Hyung Yoon:
Ohmic contacts to single-crystalline 3C-SiC films for extreme-environment MEMS applications. Microelectron. J. 39(12): 1408-1412 (2008)

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