"The influence of the AlN film texture on the wet chemical etching."

Da Chen et al. (2009)

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DOI: 10.1016/J.MEJO.2008.09.001

access: closed

type: Journal Article

metadata version: 2020-02-22

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Da Chen, Jingjing Wang, Dong Xu, Yafei Zhang:
The influence of the AlN film texture on the wet chemical etching. Microelectron. J. 40(1): 15-19 (2009)

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