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"Spin-on-glass (SOG) process-induced tungsten residue in a semiconductor ..."

Ping Hsun Chen, Tate Chen, Han Chang Shih (2004)

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DOI: 10.1016/J.MEJO.2004.06.021

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ping Hsun Chen, Tate Chen, Han Chang Shih:
Spin-on-glass (SOG) process-induced tungsten residue in a semiconductor manufacturing procedure. Microelectron. J. 35(12): 985-987 (2004)

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