"Investigation into the influence of direct current (DC) power in the ..."

Kah-Yoong Chan, Bee-San Teo (2007)

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DOI: 10.1016/J.MEJO.2006.09.011

access: closed

type: Journal Article

metadata version: 2022-10-02

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Kah-Yoong Chan, Bee-San Teo:
Investigation into the influence of direct current (DC) power in the magnetron sputtering process on the copper crystallite size. Microelectron. J. 38(1): 60-62 (2007)

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