"Thermomechanical properties of the amorphous carbon nitride thin films."

Ana Champi, R. G. Lacerda, Francisco C. Marques (2003)

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DOI: 10.1016/S0026-2692(03)00046-6

access: closed

type: Journal Article

metadata version: 2024-09-16

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Ana Champi, R. G. Lacerda, Francisco C. Marques:
Thermomechanical properties of the amorphous carbon nitride thin films. Microelectron. J. 34(5-8): 553-555 (2003)

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