"Thermo-mechanical design and characterization of low dissipation ..."

Ferenc Biró et al. (2014)

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DOI: 10.1016/J.MEJO.2014.04.034

access: closed

type: Journal Article

metadata version: 2023-09-30

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Ferenc Biró, Csaba Dücso, Zoltán Hajnal, Ferenc Riesz, Andrea Edit Pap, István Bársony:
Thermo-mechanical design and characterization of low dissipation micro-hotplates operated above 500 °C. Microelectron. J. 45(12): 1822-1828 (2014)

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